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100   $a20170906j201009    ua             0
101 0 $aeng
135   $aur|||||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$aFabrication of 3D silicon-based photonic crystal structure with "single" self aligned etching process /$fGerard Dang, Monica Taysing-Lara, and Weimin Zhou
210  1$aAdelphi, MD :$cArmy Research Laboratory,$dSeptember 2010.
215   $a1 online resource (iv, 8 pages) $ccolor illustrations
225 1 $aARL-TN ;$v0407
606   $aPhotonic crystals
606   $aNanostructured materials
615  0$aPhotonic crystals.
615  0$aNanostructured materials.
700   $aDang$b Gerard$01411781
702   $aTaysing-Lara$b Monica
702   $aZhou$b Weimin$c(Physicist),
712 02$aU.S. Army Research Laboratory,
801  0$bGPO
801  1$bGPO
801  2$bGPO
906   $aBOOK
912   $a9910701449303321
996   $aFabrication of 3D silicon-based photonic crystal structure with "single" self aligned etching process$93503746
997   $aUNINA