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001 9910699726803321
005 20101207103219.0
035   $a(CKB)5470000002405681
035   $a(OCoLC)690109866
035   $a(EXLCZ)995470000002405681
100   $a20101207d2004      ua             0
101 0 $aeng
135   $aurmn|||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$aSample preparation procedure for TEM imaging of semiconductor materials$b[electronic resource] /$fby Wendy L. Sarney
210  1$aAberdeen Proving Ground, MD :$cArmy Research Laboratory,$d[2004]
215   $a1 online resource (iv, 10 pages) $cillustrations
225 1 $aARL-TR ;$v3223
300   $aTitle from title screen (viewed on Dec. 3, 2010).
300   $a"June 2004."
300   $a000688067
320   $aIncludes bibliographical references.
517 1 $aSample preparation procedure for Transmission Electron Microscopy imaging of semiconductor materials
606   $aSemiconductors$xSampling$zUnited States
606   $aTransmission electron microscopy
615  0$aSemiconductors$xSampling
615  0$aTransmission electron microscopy.
700   $aSarney$b Wendy L$01385934
712 02$aU.S. Army Research Laboratory.
801  0$bGPO
801  1$bGPO
906   $aBOOK
912   $a9910699726803321
996   $aSample preparation procedure for TEM imaging of semiconductor materials$93540207
997   $aUNINA