LEADER 03040nam  22006015  450 
001 9910698652403321
005 20251009075050.0
010   $a981-19-9247-9
024 7 $a10.1007/978-981-19-9247-6
035   $a(CKB)5580000000531697
035   $a(DE-He213)978-981-19-9247-6
035   $a(PPN)26966002X
035   $a(MiAaPQ)EBC31094158
035   $a(Au-PeEL)EBL31094158
035   $a(MiAaPQ)EBC7238782
035   $a(EXLCZ)995580000000531697
100   $a20230417d2023      u|         0
101 0 $aeng
135   $aurnn|008mamaa
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$aDual-Mass Linear Vibration Silicon-Based MEMS Gyroscope /$fby Huiliang Cao
205   $a1st ed. 2023.
210  1$aSingapore :$cSpringer Nature Singapore :$cImprint: Springer,$d2023.
215   $a1 online resource (X, 224 p. 200 illus., 137 illus. in color.) 
311 08$a981-19-9246-0 
320   $aIncludes bibliographical references.
327   $aChapter 1 Introduction -- Chapter 2 Silicon-based MEMS gyroscope structure and working principle -- Chapter 3 Silicon-based MEMS gyroscope structure noise analysis and system model -- Chapter 4 Silicon-based MEMS gyroscope quadrature error correction technology and optimization -- Chapter 5 Silicon-based MEMS gyroscope sense closed loop and frequency tuning technology -- Chapter 6 Temperature influence on MEMS gyroscope and suppression method -- Chapter 7 Silicon-based MEMS gyroscope monitoring circuit design and test technology -- References.
330   $aThis book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding. It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes.
606   $aAerospace engineering
606   $aAstronautics
606   $aAutomatic control
606   $aRobotics
606   $aAutomation
606   $aAerospace Technology and Astronautics
606   $aControl, Robotics, Automation
615  0$aAerospace engineering.
615  0$aAstronautics.
615  0$aAutomatic control.
615  0$aRobotics.
615  0$aAutomation.
615 14$aAerospace Technology and Astronautics.
615 24$aControl, Robotics, Automation.
676   $a681.753
700   $aCao$b Huiliang$01352772
801  0$bMiAaPQ
801  1$bMiAaPQ
801  2$bMiAaPQ
906   $aBOOK
912   $a9910698652403321
996   $aDual-Mass Linear Vibration Silicon-Based MEMS Gyroscope$93200547
997   $aUNINA