LEADER 01357nam  2200409   450 
001 9910698635603321
005 20150929152445.0
035   $a(CKB)5470000002436290
035   $a(OCoLC)922547420
035   $a(EXLCZ)995470000002436290
100   $a20150929j201408    ua             0
101 0 $aeng
135   $aurcn|||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$aHermetic encapsulation of nanoenergetic porous silicon wafer by parylene /$fEugene Zakar [and five others]
210  1$aAdelphi, MD :$cArmy Research Laboratory,$dAugust 2014.
215   $a1 online resource (iv, 12 pages) $ccolor illustrations
225 1 $aARL-TR ;$v7025
300   $aTitle from title screen (viewed Sept. 29, 2015).
300   $a"August 2014."
320   $aIncludes bibliographical references (page 11).
606   $aMicroencapsulation
606   $aSilicon polymers
606   $aIntegrated circuits
615  0$aMicroencapsulation.
615  0$aSilicon polymers.
615  0$aIntegrated circuits.
700   $aZakar$b Eugene$01387268
712 02$aU.S. Army Research Laboratory,
801  0$bGPO
801  1$bGPO
906   $aBOOK
912   $a9910698635603321
996   $aHermetic encapsulation of nanoenergetic porous silicon wafer by parylene$93485268
997   $aUNINA