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100   $a20060504d2005      ua             0
101 0 $aeng
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 02$aA comprehensive model of hydrogen transport into a solar cell during silicon nitride processing for fire-through metallization$b[electronic resource] /$fB. Sopori ... [and others]
210  1$aGolden, Colo. :$cNational Renewable Energy Laboratory,$d[2005]
215   $a4 pages $cdigital, PDF file
225 1 $aConference paper ;$vNREL/CP-520-37477
300   $aTitle from title screen (viewed on May 4, 2006).
606   $aSolar cells$xMaterials
606   $aHydrogen$xTransport properties
606   $aPlasma-enhanced chemical vapor deposition
615  0$aSolar cells$xMaterials.
615  0$aHydrogen$xTransport properties.
615  0$aPlasma-enhanced chemical vapor deposition.
701   $aSopori$b Bhushan Lal$01382971
712 02$aNational Renewable Energy Laboratory (U.S.)
801  0$bGPO
801  1$bGPO
906   $aBOOK
912   $a9910698274303321
996   $aA comprehensive model of hydrogen transport into a solar cell during silicon nitride processing for fire-through metallization$93430543
997   $aUNINA