LEADER 01288oam  2200373Ka 450 
001 9910698177003321
005 20090527091519.0
035   $a(CKB)5470000002395240
035   $a(OCoLC)351779555
035   $a(EXLCZ)995470000002395240
100   $a20090526d2008      uy             0
101 0 $aeng
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$aThermal characterization of thin films for MEMS applications$b[electronic resource] /$fby David J. Howe and Brian Morgan
210  1$aAdelphi, Md. :$cArmy Research Laboratory,$d[2008]
215   $aiv, 14 pages $cdigital, PDF file
225 1 $aARL-TR ;$v4378
300   $aTitle from title screen (viewed on May 26, 2009).
300   $a"February 2008."
517 3 $aThermal characterization of thin films for microelectromechanical systems applications
606   $aMicroelectromechanical systems
615  0$aMicroelectromechanical systems.
700   $aHowe$b David J$01395576
701   $aMorgan$b Brian$0633054
712 02$aU.S. Army Research Laboratory.
801  0$bGPO
801  1$bGPO
801  2$bGPO
906   $aBOOK
912   $a9910698177003321
996   $aThermal characterization of thin films for MEMS applications$93454347
997   $aUNINA