LEADER 01328nam  2200397Ia 450 
001 9910698037403321
005 20090220163731.0
035   $a(CKB)5470000002394630
035   $a(OCoLC)309886255
035   $a(EXLCZ)995470000002394630
100   $a20090219d2008      ua             0
101 0 $aeng
135   $aurmn|||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$aOptimization of PbTiO? seed layers for PZT MEMS actuators$b[electronic resource] /$fLuz Sanchez and Ronald G. Polcawich
210  1$aAdelphi, MD :$cArmy Research Laboratory,$d[2008]
215   $avi, 22 pages $cdigital, PDF file
225 1 $aARL-TR ;$v4697
300   $aTitle from title screen (viewed Feb. 19, 2009).
300   $a"December 2008."
320   $aIncludes bibliographical references (page 20).
606   $aFerroelectric crystals
606   $aFerroelectric thin films
615  0$aFerroelectric crystals.
615  0$aFerroelectric thin films.
700   $aSanchez$b Luz$01391989
701   $aPolcawich$b Ronald G$01391990
712 02$aU.S. Army Research Laboratory.
801  0$bGPO
801  1$bGPO
906   $aBOOK
912   $a9910698037403321
996   $aOptimization of PbTiO? seed layers for PZT MEMS actuators$93446207
997   $aUNINA