LEADER 01545nam 2200469Ka 450 001 9910697914803321 005 20090127092413.0 035 $a(CKB)5470000002393849 035 $a(OCoLC)299751759 035 $a(EXLCZ)995470000002393849 100 $a20090127d1989 ua 0 101 0 $aeng 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 10$aIon beam and plasma methods of producing diamondlike carbon films$b[electronic resource] /$fDiane M. Swec, Michael J. Mirtich, and Bruce A. Banks 210 1$a[Washington, D.C.] :$cNational Aeronautics and Space Administration,$d[1989] 215 $a1 volume 225 1 $aNASA technical memorandum ;$v102301 300 $aTitle from title screen (viewed Jan. 26, 2009) 606 $aCarbon$2nasat 606 $aDeposition$2nasat 606 $aDiamonds$2nasat 606 $aProtective coatings$2nasat 606 $aSputtering$2nasat 606 $aThin films$2nasat 615 7$aCarbon. 615 7$aDeposition. 615 7$aDiamonds. 615 7$aProtective coatings. 615 7$aSputtering. 615 7$aThin films. 700 $aSwec$b Diane M$01405105 701 $aMirtich$b Michael J$01405106 701 $aBanks$b Bruce A$01390437 712 02$aUnited States.$bNational Aeronautics and Space Administration. 801 0$bGPO 801 1$bGPO 906 $aBOOK 912 $a9910697914803321 996 $aIon beam and plasma methods of producing diamondlike carbon films$93481024 997 $aUNINA