LEADER 01532oam  2200421Ia 450 
001 9910697294203321
005 20230902161606.0
035   $a(CKB)5470000002385976
035   $a(OCoLC)74275002
035   $a(EXLCZ)995470000002385976
100   $a20090122d2004      ka             0
101 0 $aeng
135   $aurmn|||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 12$aA piezoelectric MEMS microphone based on lead zirconate titanate (PZT) thin films$b[electronic resource] /$fRonald G. Polcawich
210  1$aAdelphi, MD :$cArmy Research Laboratory,$d[2004]
215   $a1 online resource (vi, 20 pages) $cillustrations (some color), charts (some color)
225 1 $aARL-TR ;$v3387
300   $aTitle from PDF title screen (viewed on Aug. 10, 2010).
300   $a"November 2004."
320   $aIncludes bibliographical references (pages 17-18).
410  0$aARL-TR (Aberdeen Proving Ground, Md.) ;$v3387.
517   $aPiezoelectric MEMS microphone based on lead zirconate titanate 
606   $aMicroelectromechanical systems
606   $aMicrophone
615  0$aMicroelectromechanical systems.
615  0$aMicrophone.
700   $aPolcawich$b Ronald G$01391990
712 02$aU.S. Army Research Laboratory.
801  0$bDTICE
801  1$bDTICE
801  2$bGPO
906   $aBOOK
912   $a9910697294203321
996   $aA piezoelectric MEMS microphone based on lead zirconate titanate (PZT) thin films$93459075
997   $aUNINA