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210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d1971.
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300   $a1971.
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300   $aTitle from PDF title page.
320   $aIncludes bibliographical references.
517   $aMethods of measurement for semiconductor materials, process control, and devices 
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200 10$aHigher moments in perturbation solution of the linear-quadratic exponential Gaussian optimal control problem$b[electronic resource] /$fBaoline Chen, Peter A. Zadrozny
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