LEADER 01641nam 2200397Ka 450 001 9910696420503321 005 20080401105155.0 035 $a(CKB)5470000002378639 035 $a(OCoLC)216928854 035 $a(EXLCZ)995470000002378639 100 $a20080401d2006 ua 0 101 0 $aeng 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 00$aMeasurement of depositing and bombarding species involved in the plasma production of amorphous silicon and silicon/germanium solar cells$b[electronic resource] $eannual technical report, 1 June 2002 - 31 May 2005 /$fA. Gallagher ... [and others] 210 1$aGolden, Colo. :$cNational Renewable Energy Laboratory,$d[2006] 215 $aiv, 29 pages $cdigital, PDF file 225 1 $aNREL/SR ;$v520-40056 300 $aTitle from title screen (viewed Mar. 14, 2008). 300 $a"June 2006." 517 $aMeasurement of depositing and bombarding species involved in the plasma production of amorphous silicon and silicon/germanium solar cells 606 $aPhotovoltaic cells$xResearch 606 $aCrystal growth$xResearch 606 $aThin films$xResearch 615 0$aPhotovoltaic cells$xResearch. 615 0$aCrystal growth$xResearch. 615 0$aThin films$xResearch. 701 $aGallagher$b A$01406074 712 02$aNational Renewable Energy Laboratory (U.S.) 801 0$bGPO 801 1$bGPO 906 $aBOOK 912 $a9910696420503321 996 $aMeasurement of depositing and bombarding species involved in the plasma production of amorphous silicon and silicon$93484071 997 $aUNINA