LEADER 02398nam 2200385 450 001 9910688418803321 005 20230630055949.0 010 $a3-03842-605-9 024 7 $a10.3390/books978-3-03842-605-9 035 $a(CKB)5400000000000664 035 $a(NjHacI)995400000000000664 035 $a(EXLCZ)995400000000000664 100 $a20230630d2017 uy 0 101 0 $aeng 135 $aur||||||||||| 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 00$aMicro/Nano Manufacturing /$fedited by Guido Tosello and Hans Hansen 210 1$aBasel, Switzerland :$cMDPI - Multidisciplinary Digital Publishing Institute,$d2017. 215 $a1 online resource (190 pages) $cillustrations 320 $aIncludes bibliographical references. 330 $aMicro- and nano-scale manufacturing has been the subject of ever more research and industrial focus over the past 10 years. Traditional lithography-based technology forms the basis of micro-electro-mechanical systems (MEMS) manufacturing, but also precision manufacturing technologies have been developed to cover micro-scale dimensions and accuracies. Furthermore, these fundamentally different technology platforms are currently combined in order to exploit the strengths of both platforms. One example is the use of lithography-based technologies to establish nanostructures that are subsequently transferred to 3D geometries via injection molding. Manufacturing processes at the micro-scale are the key-enabling technologies to bridge the gap between the nano- and the macro-worlds to increase the accuracy of micro/nano-precision production technologies, and to integrate different dimensional scales in mass-manufacturing processes. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on novel methodological developments in micro- and nano-scale manufacturing, i.e., on novel process chains including process optimization, quality assurance approaches and metrology. 517 $aMicro/Nano Manufacturing 606 $aNanostructured materials 615 0$aNanostructured materials. 676 $a620.115 702 $aTosello$b Guido 702 $aHansen$b Hans 801 0$bNjHacI 801 1$bNjHacl 906 $aBOOK 912 $a9910688418803321 996 $aMicro-$93060053 997 $aUNINA