LEADER 02228nam 2200385 450 001 9910688325703321 005 20230624115731.0 024 7 $a10.5772/intechopen.75346 035 $a(CKB)5400000000043442 035 $a(NjHacI)995400000000043442 035 $a(EXLCZ)995400000000043442 100 $a20230624d2019 uy 0 101 0 $aeng 135 $aur||||||||||| 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 00$aMicromachining /$fedited by Zdravko Stanimirovic?, Ivanka Stanimirovic? 210 1$aLondon :$cIntechOpen,$d2019. 210 4$dİ2019 215 $a1 online resource (172 pages) 311 $a1-83962-780-8 320 $aIncludes bibliographical references and index. 330 $aTo present their work in the field of micromachining, researchers from distant parts of the world have joined their efforts and contributed their ideas according to their interest and engagement. Their articles will give you the opportunity to understand the concepts of micromachining of advanced materials. Surface texturing using pico- and femto-second laser micromachining is presented, as well as the silicon-based micromachining process for flexible electronics. You can learn about the CMOS compatible wet bulk micromachining process for MEMS applications and the physical process and plasma parameters in a radio frequency hybrid plasma system for thin-film production with ion assistance. Last but not least, study on the specific coefficient in the micromachining process and multiscale simulation of influence of surface defects on nanoindentation using quasi-continuum method provides us with an insight in modelling and the simulation of micromachining processes. The editors hope that this book will allow both professionals and readers not involved in the immediate field to understand and enjoy the topic. 606 $aPharmaceutical technology 615 0$aPharmaceutical technology. 676 $a615.19 702 $aStanimirovic?$b Zdravko 702 $aStanimirovic?$b Ivanka 801 0$bNjHacI 801 1$bNjHacl 906 $aBOOK 912 $a9910688325703321 996 $aMicromachining$92200601 997 $aUNINA