LEADER 03257nam 2200697Ia 450 001 9910634050103321 005 20200520144314.0 010 $a1-280-96030-2 010 $a9786610960309 010 $a3-540-44502-1 024 7 $a10.1007/978-3-540-44502-9 035 $a(CKB)1000000000399563 035 $a(EBL)372793 035 $a(OCoLC)185026696 035 $a(SSID)ssj0000250225 035 $a(PQKBManifestationID)11923346 035 $a(PQKBTitleCode)TC0000250225 035 $a(PQKBWorkID)10232667 035 $a(PQKB)11146621 035 $a(SSID)ssj0000774077 035 $a(PQKBManifestationID)12330329 035 $a(PQKBTitleCode)TC0000774077 035 $a(PQKBWorkID)10846026 035 $a(PQKB)11299922 035 $a(DE-He213)978-3-540-44502-9 035 $a(MiAaPQ)EBC372793 035 $a(PPN)123157161 035 $a(EXLCZ)991000000000399563 100 $a20061215d2007 uy 0 101 0 $aeng 135 $aur|n|---||||| 181 $ctxt 182 $cc 183 $acr 200 00$aSputtering by particle bombardment $eexperiments and computer calculations from threshold to MeV energies /$fRainer Behrisch, Wolfgang Eckstein (eds.) 205 $a1st ed. 2007. 210 $aBerlin $cSpringer$dc2007 215 $a1 online resource (526 p.) 225 1 $aTopics in applied physics ;$vv. 110 300 $aDescription based upon print version of record. 311 $a3-642-07944-X 311 $a3-540-44500-5 320 $aIncludes bibliographical references and index. 327 $aand Overview -- Computer Simulation of the Sputtering Process -- Sputtering Yields -- Results of Molecular Dynamics Calculations -- Energy and Angular Distributions of Sputtered Species -- Chemical Sputtering -- Electronic Sputtering with Swift Heavy Ions. 330 $aThis volume gives a comprehensive overview about the physical processes causing sputtering of solids at bombardment with energetic ions. The most important quantities are the sputtering yields, i.e. the average number of atoms eroded per incident ion. The latest results for the sputtering yields and their dependence on the incident energy and angle of incidence, as well as the energy and angular distributions of the sputtered atoms are presented. This concerns experimentally determined yields as well as a critical evaluation of the computational methods used to calculate the yields and distributions. The energies of the incident ions cover the range between a few eV up to several MeV. The influence of chemical effects between the incident ions and the atoms of the bombarded solid on the sputtering yields are also reviewed. 410 0$aTopics in applied physics ;$vv. 110. 517 3 $aExperiments and computer calculations from threshold to MeV energies 606 $aSolid state physics 606 $aSputtering (Physics) 615 0$aSolid state physics. 615 0$aSputtering (Physics) 676 $a530.416 701 $aBehrisch$b Rainer$01753718 701 $aEckstein$b Wolfgang$01753719 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9910634050103321 996 $aSputtering by particle bombardment$94189701 997 $aUNINA