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101 0 $aeng
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200 10$aProduction planning and control in semiconductor manufacturing $ebig data analytics and Industry 4.0 applications /$fTin-Chih Toly Chen
210  1$aCham, Switzerland :$cSpringer,$d[2023]
210  4$dİ2023
215   $a1 online resource (106 pages)
225 1 $aSpringerBriefs in Applied Sciences and Technology 
311 08$aPrint version: Chen, Tin-Chih Toly Production Planning and Control in Semiconductor Manufacturing Cham : Springer International Publishing AG,c2022 9783031140648 
410  0$aSpringerBriefs in Applied Sciences and Technology 
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996   $aProduction planning and control in semiconductor manufacturing$93033720
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