LEADER 00640oas 2200205z- 450 001 9910626164703321 005 20210201092553.0 035 $a(CKB)1000000000278433 035 $a(IEEE)1000243 035 $a(IEEE)1002354 035 $a(EXLCZ)991000000000278433 100 $a20200609cuuuuuuuu -u- - 101 0 $aeng 200 00$aElectron Devices and Materials Symposium, EDMS, International 210 $a[Novosibirsk]$cNovosibirsk State Technical University 311 $a1815-3712 906 $aCONFERENCE 912 $a9910626164703321 996 $aElectron Devices and Materials Symposium, EDMS, International$91886861 997 $aUNINA