LEADER 01671oas 22006133a 450 001 9910626141303321 005 20250711213020.0 011 $a2164-1641 035 $a(OCoLC)297988098 035 $a(CONSER) 2011203328 035 $a(CKB)3400000000015053 035 $a(EXLCZ)993400000000015053 100 $a20090109b20032009 uy a 101 0 $aeng 135 $aur||||||||||| 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 10$aDigest of technical papers /$fInternational Conference on Solid-State Sensors, Actuators and Microsystems 210 $aPiscataway, NJ $cIEEE$dİ2003- 311 08$a2159-547X 517 1 $aTransducers 517 1 $aTechnical digest 531 0 $aDig. tech. pap. 606 $aTransducers$vCongresses 606 $aDetectors$vCongresses 606 $aActuators$vCongresses 606 $aActuators$2fast$3(OCoLC)fst00796346 606 $aDetectors$2fast$3(OCoLC)fst00891594 606 $aTransducers$2fast$3(OCoLC)fst01154575 608 $aConference papers and proceedings.$2fast 615 0$aTransducers 615 0$aDetectors 615 0$aActuators 615 7$aActuators. 615 7$aDetectors. 615 7$aTransducers. 676 $a681 712 02$aIEEE Electron Devices Society. 801 0$bOCLCE 801 1$bOCLCE 801 2$bOCLCE 801 2$bOCLCQ 801 2$bDLC 801 2$bOCLCQ 801 2$bOCLCF 801 2$bOCL 801 2$bOCLCA 801 2$bOCLCQ 801 2$bOCLCL 906 $aCONFERENCE 912 $a9910626141303321 996 $aDigest of technical papers$91886003 997 $aUNINA