LEADER 00325nas##22001097##450#
001 9910618825903321
100   $a########d########u##y0engy50####ba
105 0 $a########00###
200 1 $a[1992 Proceedings] IEEE/SEMI International Semiconductor Manufacturing Science Symposium
912   $a9910618825903321
996   $aIEEE$9878179
997   $aUNINA