LEADER 00342nas##22001097##450#
001 9910618654803321
100   $a########d########u##y0engy50####ba
105 0 $a########00###
200 1 $aIEEE/CPMT/SEMI 29th International Electronics Manufacturing Technology Symposium (IEEE Cat. No.04CH37585)
912   $a9910618654803321
996   $aIEEE$9878179
997   $aUNINA