LEADER 00402nas##22001097##450# 001 9910618437603321 100 $a########d########u##y0engy50####ba 105 0 $a########00### 200 1 $a2008 International Conference on Perspective Technologies and Methods in MEMS Design 912 $a9910618437603321 996 $a2008 International Conference on Perspective Technologies and Methods in MEMS Design$92545935 997 $aUNINA