LEADER 00326nas##22001097##450#
001 9910617895803321
100   $a########d########u##y0engy50####ba
105 0 $a########00###
200 1 $a24th European Mask and Lithography Conference
912   $a9910617895803321
996   $a"24th European Mask and Lithography Conference"$92808253
997   $aUNINA