LEADER 00324nas##22001097##450#
001 9910617702603321
100   $a########d########u##y0engy50####ba
105 0 $a########00###
200 1 $a23rd European Mask and Lithography Conference
912   $a9910617702603321
996   $a23rd European Mask and Lithography Conference$92535524
997   $aUNINA