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100   $a20220907d2018      uy             0
101 0 $aeng
135   $aur|||||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$aQuantitative Data Processing in Scanning Probe Microscopy $eSPM Applications for Nanometrology /$fPetr Klapetek
205   $aSecond edition.
210  1$aSan Diego :$cElsevier Science,$d[2018]
210  4$dİ2018
215   $a1 online resource (xviii, 397 pages) $cillustrations
225 1 $aMicro & nano technologies
320   $aIncludes bibliographical references and index.
410  0$aMicro & nano technologies.
606   $aScanning probe microscopy
615  0$aScanning probe microscopy.
676   $a620.5
700   $aKlapetek$b Petr$0996131
801  0$bNjHacI
801  1$bNjHacl
906   $aBOOK
912   $a9910583383403321
996   $aQuantitative data processing in scanning probe microscopy$92887579
997   $aUNINA