LEADER 03154nam 2200505 450 001 9910583349103321 005 20190117033410.0 010 $a0-08-102055-4 035 $a(CKB)2550000001250809 035 $a(CaSebORM)9780081020562 035 $a(MiAaPQ)EBC5309980 035 $a(PPN)233899618 035 $a(EXLCZ)992550000001250809 100 $a20180315h20182018 uy 0 101 0 $aeng 135 $aurcnu|||||||| 181 $2rdacontent 182 $2rdamedia 183 $2rdacarrier 200 00$aSmart sensors and MEMS $eintelligent devices and microsystems for industrial applications /$fedited by Stoyan Nihtianov, Antonio Luque 205 $aSecond edition. 210 1$aDuxford, England :$cWoodhead Publishing,$d2018. 210 4$dİ2018 215 $a1 online resource (593 pages) $cillustrations, tables 225 1 $aWoodhead Publishing Series in Electronic and Optical Materials 311 $a0-08-102056-2 311 $a1-306-54093-3 320 $aIncludes bibliographical references at the end of each chapters and index. 330 $aSmart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS). The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information. Contains new chapters that address key applications, such as magnetic sensors, microreaction chambers and temperature sensors Provides an in-depth information on a wide array of industrial applications for smart sensors and smart MEMS Presents the only book to discuss both smart sensors and MEMS for industrial applications 410 0$aWoodhead Publishing series in electronic and optical materials. 606 $aDetectors$xIndustrial applications 606 $aMicroelectromechanical systems$xIndustrial applications 615 0$aDetectors$xIndustrial applications. 615 0$aMicroelectromechanical systems$xIndustrial applications. 676 $a681.2 700 $aNihtianov$b S$0857469 702 $aNihtianov$b Stoyan 702 $aLuque$b Antonio 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9910583349103321 996 $aSmart sensors and MEMS$91914595 997 $aUNINA