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200 00$aHandbook of silicon wafer cleaning technology /$fedited by Karen Reinhardt, Werner Kern
205   $aThird edition.
210  1$aOxford, [England] ;$aCambridge, [Massachusetts] :$cWilliam Andrew,$d2018.
210  4$dİ2018
215   $a1 online resource (775 pages)
320   $aIncludes bibliographical references and index.
606   $aSilicon-on-insulator technology
615  0$aSilicon-on-insulator technology.
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