LEADER 02563nam 2200481 450 001 9910583303203321 005 20210201203539.0 010 $a0-12-813084-9 010 $a0-12-813085-7 035 $a(CKB)4100000006096042 035 $a(MiAaPQ)EBC5507848 035 $a(EXLCZ)994100000006096042 100 $a20180926d2018 uy 0 101 0 $aeng 135 $aurcnu|||||||| 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 14$aThe foundations of vacuum coating technology$b[electronic resource] /$fDonald M. Mattox 210 1$aOxford :$cWilliam Andrew,$d[2018] 210 4$dİ2018 215 $a1 online resource (383 pages) 327 $aAbout This Book -- Vacuum Technology -- Plasmas and Plasma Enhanced CVD -- Physical Sputtering and Sputter Deposition -- Thermal Evaporation and Deposition in Vacuum -- Cathodic Arc Vaporization and Cathodic Arc Vapor Deposition -- Ion Plating -- Condensation, Nucleation, Interface Formation, and Film Growth -- Historical Timeline . 330 $aThe Foundations of Vacuum Coating Technology, Second Edition, is a revised and expanded version of the first edition, which was published in 2003. The book reviews the histories of the various vacuum coating technologies and expands on the history of the enabling technologies of vacuum technology, plasma technology, power supplies, and low-pressure plasma-enhanced chemical vapor deposition. The melding of these technologies has resulted in new processes and products that have greatly expanded the application of vacuum coatings for use in our everyday lives. The book is unique in that it makes extensive reference to the patent literature (mostly US) and how it relates to the history of vacuum coating. The book includes a Historical Timeline of Vacuum Coating Technology and a Historical Timeline of Vacuum/Plasma Technology, as well as a Glossary of Terms used in the vacuum coating and surface engineering industries. 606 $aManufacturing processes$xAutomation 606 $aVacuum 606 $aPlasma 606 $aVacuum 606 $aVacuum technology 615 0$aManufacturing processes$xAutomation. 615 2$aVacuum. 615 2$aPlasma. 615 0$aVacuum. 615 0$aVacuum technology. 676 $a670.427 700 $aMattox$b D. M.$0964240 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9910583303203321 996 $aThe foundations of vacuum coating technology$92187036 997 $aUNINA