LEADER 01542nam  2200433   450 
001 9910561297003321
005 20231110233352.0
010   $a981-19-1918-6
035   $a(MiAaPQ)EBC6954104
035   $a(Au-PeEL)EBL6954104
035   $a(CKB)21522630700041
035   $a(PPN)262168812
035   $a(EXLCZ)9921522630700041
100   $a20221120d2022      uy             0
101 0 $aeng
135   $aurcnu||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 00$aProceedings of the 7th International Conference on Nanomanufacturing (nanoMan2021) /$fShuming Yang [and three others]
210  1$aSingapore :$cSpringer,$d[2022]
210  4$dİ2022
215   $a1 online resource (309 pages)
225 1 $aSmart Innovation, Systems and Technologies ;$vv.296
311 08$aPrint version: Yang, Shuming Proceedings of the 7th International Conference on Nanomanufacturing (nanoMan2021) Singapore : Springer Singapore Pte. Limited,c2022 9789811919176 
410  0$aSmart Innovation, Systems and Technologies 
606   $aNanotechnology$xResearch
606   $aNanotechnology$xSafety measures
615  0$aNanotechnology$xResearch.
615  0$aNanotechnology$xSafety measures.
676   $a620.5
702   $aYang$b Shuming
801  0$bMiAaPQ
801  1$bMiAaPQ
801  2$bMiAaPQ
906   $aBOOK
912   $a9910561297003321
996   $aProceedings of the 7th International Conference on Nanomanufacturing (nanoMan2021)$92968753
997   $aUNINA