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010   $a981-19-1918-6
024 7 $a10.1007/978-981-19-1918-3
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035   $a(CKB)21522630700041
035   $a(PPN)262168812
035   $a(OCoLC)1311966719
035   $a(DE-He213)978-981-19-1918-3
035   $a(EXLCZ)9921522630700041
100   $a20220415d2022      u|         0
101 0 $aeng
135   $aurcnu||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$aProceedings of the 7th International Conference on Nanomanufacturing (nanoMan2021) /$fedited by Shuming Yang, Xichun Luo, Yongda Yan, Zhuangde Jiang
205   $a1st ed. 2022.
210  1$aSingapore :$cSpringer Nature Singapore :$cImprint: Springer,$d2022.
215   $a1 online resource (309 pages)
225 1 $aSmart Innovation, Systems and Technologies,$x2190-3026 ;$v296
311 08$aPrint version: Yang, Shuming Proceedings of the 7th International Conference on Nanomanufacturing (nanoMan2021) Singapore : Springer Singapore Pte. Limited,c2022 9789811919176 
327   $aAdvanced Nanomaterials -- Micro/Nanomachining -- Laser Micro/Nano Materials Processing -- Micro/Nanopatterning,Micro-featured Surfaces &Surface Modification -- Micro/Nanoforming -- Process Monitoring and Quality Control -- Modeling & Simulation at Micro/Nano Scale -- Nanoscale,Multiscale Modelling & Analysis -- Nano Characterization and Tools -- Nano/Microsystems &Auto-assembly -- High Precision Machines -- Micro/Nano-electromechanical Systems -- Ultraprecision Manufacturing Systems -- Optical Machining & Measurement -- Atomic and Close-to-atomic Scale Manufacturing (ACSM) -- Other Technologies Associated with Micro/Nano Manufacturing.
330   $aThis book is a compilation of selected papers from the 7th International Conference on Nanomanufacturing (nanoMan2021), held in Xi?an on November 17-19, 2021 after postponing twice due to COVID-19 pandemic. It encompasses the synthesis of nanomaterials, the fabrication of devices, the characterization of various products and systems, process monitoring and quality control, simulations, and the applications of nanoscience and nanotechnologies.
410  0$aSmart Innovation, Systems and Technologies,$x2190-3026 ;$v296
606   $aNanotechnology
606   $aMaterials
606   $aNanotechnology
606   $aMaterials Engineering
615  0$aNanotechnology.
615  0$aMaterials.
615 14$aNanotechnology.
615 24$aMaterials Engineering.
676   $a620.5
702   $aYang$b Shuming
801  0$bMiAaPQ
801  1$bMiAaPQ
801  2$bMiAaPQ
906   $aBOOK
912   $a9910561297003321
996   $aProceedings of the 7th International Conference on Nanomanufacturing (nanoMan2021)$92968753
997   $aUNINA