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101 0 $aeng
135   $aurcnu||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$aMicrowave plasma sources and methods in processing technology /$fLadislav Bardos, Hana Barankova, Uppsala University, Uppsala, Sweden
210  1$aHoboken, New Jersey :$cJohn Wiley & Sons,$d[2022]
210  4$dİ2022
215   $a1 online resource (262 pages)
311 08$aPrint version: Bardos, Ladislav Microwave Plasma Sources and Methods in Processing Technology Newark : John Wiley & Sons, Incorporated,c2022 9781119826873 
320   $aIncludes bibliographical references and index.
606   $aElectromagnetism
615  0$aElectromagnetism.
676   $a660.044
700   $aBardos$b Ladislav$f1947-$01258930
702   $aBarankova$b Hana$f1951-
801  0$bMiAaPQ
801  1$bMiAaPQ
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906   $aBOOK
912   $a9910554862703321
996   $aMicrowave plasma sources and methods in processing technology$92917426
997   $aUNINA