LEADER 03676nam 22005895 450 001 9910350221703321 005 20200706042247.0 010 $a981-15-0046-0 024 7 $a10.1007/978-981-15-0046-6 035 $a(CKB)4100000009451877 035 $a(DE-He213)978-981-15-0046-6 035 $a(MiAaPQ)EBC5899816 035 $a(PPN)258304715 035 $a(EXLCZ)994100000009451877 100 $a20190920d2019 u| 0 101 0 $aeng 135 $aurnn|008mamaa 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 10$aInvestigation on SiGe Selective Epitaxy for Source and Drain Engineering in 22 nm CMOS Technology Node and Beyond /$fby Guilei Wang 205 $a1st ed. 2019. 210 1$aSingapore :$cSpringer Singapore :$cImprint: Springer,$d2019. 215 $a1 online resource (XVI, 115 p.) 225 1 $aSpringer Theses, Recognizing Outstanding Ph.D. Research,$x2190-5053 300 $a"Doctoral thesis accepted by Chinese Academy of Sciences, Beijing, China"--Title page. 311 $a981-15-0045-2 320 $aIncludes bibliographical references. 327 $aIntroduction -- Strain technology of Si-based materials -- SiGe Epitaxial Growth and material characterization -- SiGe Source and Drain Integration and transistor performance investigation -- Pattern Dependency behavior of SiGe Selective Epitaxy -- Summary and final words. 330 $aThis thesis presents the SiGe source and drain (S/D) technology in the context of advanced CMOS, and addresses both device processing and epitaxy modelling. As the CMOS technology roadmap calls for continuously downscaling traditional transistor structures, controlling the parasitic effects of transistors, e.g. short channel effect, parasitic resistances and capacitances is becoming increasingly difficult. The emergence of these problems sparked a technological revolution, where a transition from planar to three-dimensional (3D) transistor design occurred in the 22nm technology node. The selective epitaxial growth (SEG) method has been used to deposit SiGe as stressor material in S/D regions to induce uniaxial strain in the channel region. The thesis investigates issues of process integration in IC production and concentrates on the key parameters of high-quality SiGe selective epitaxial growth, with a special focus on its pattern dependency behavior and on key integration issues in both 2D and 3D transistor structures, the goal being to improve future applications of SiGe SEG in advanced CMOS. 410 0$aSpringer Theses, Recognizing Outstanding Ph.D. Research,$x2190-5053 606 $aSemiconductors 606 $aElectronic circuits 606 $aNanotechnology 606 $aSemiconductors$3https://scigraph.springernature.com/ontologies/product-market-codes/P25150 606 $aCircuits and Systems$3https://scigraph.springernature.com/ontologies/product-market-codes/T24068 606 $aNanotechnology and Microengineering$3https://scigraph.springernature.com/ontologies/product-market-codes/T18000 615 0$aSemiconductors. 615 0$aElectronic circuits. 615 0$aNanotechnology. 615 14$aSemiconductors. 615 24$aCircuits and Systems. 615 24$aNanotechnology and Microengineering. 676 $a537.622 700 $aWang$b Guilei$4aut$4http://id.loc.gov/vocabulary/relators/aut$0838756 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9910350221703321 996 $aInvestigation on SiGe Selective Epitaxy for Source and Drain Engineering in 22 nm CMOS Technology Node and Beyond$91873375 997 $aUNINA LEADER 04527nam 22006615 450 001 9910544859403321 005 20251113180629.0 010 $a9783030876456$b(electronic bk.) 010 $z9783030876449 024 7 $a10.1007/978-3-030-87645-6 035 $a(MiAaPQ)EBC6887196 035 $a(Au-PeEL)EBL6887196 035 $a(CKB)21167318000041 035 $a(PPN)260828785 035 $a(OCoLC)1299382721 035 $a(DE-He213)978-3-030-87645-6 035 $a(EXLCZ)9921167318000041 100 $a20220212d2022 u| 0 101 0 $aeng 135 $aurcnu|||||||| 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 10$aPaleogene Fossil Birds /$fby Gerald Mayr 205 $a2nd ed. 2022. 210 1$aCham :$cSpringer International Publishing :$cImprint: Springer,$d2022. 215 $a1 online resource (247 pages) 225 1 $aFascinating Life Sciences,$x2509-6753 311 08$aPrint version: Mayr, Gerald Paleogene Fossil Birds Cham : Springer International Publishing AG,c2022 9783030876449 320 $aIncludes bibliographical references. 327 $aChapter 1. Introduction -- Chapter 2. Basic Terminology and the Broader Phylogenetic and Geological Framework -- Chapter 3. Palaeognathous Birds -- Chapter 4. Pelagornithidae, Gastornithidae, and Crown Group Galloanseres -- Chapter 5. Mirandornithes (Grebes and Flamingos), Charadriiformes (Shorebirds and Allies), and Gruiformes (Rails, Cranes, and Allies) -- Chapter 6. Opisthocomiformes (Hoatzins), ?Columbaves? (Doves, Cuckoos, Bustards, and Allies), and Strisores (Nightjars, Swifts, Hummingbirds, and Allies) -- Chapter 7. Phaethontiformes and Aequornithes: The Aquatic and Semi-Aquatic Neaovian Taxa -- Chapter 8. Accipitriformes (New World Vultures, Hawks, and Allies), Falconiformes (Falcons), and Cariamiformes (Seriemas and Allies) -- Chapter 9. Psittacopasseres ? Psittaciformes (Parrots) and Passeriformes (Passerines) -- Chapter 10. Strigiformes (Owls), Coliiformes (Mousebirds), and Cavitaves (Trogons, Rollers, Woodpeckers, and Allies) -- Chapter 11. Paleogene Avifaunas: A Synopsis of General Biogeographic and Paleoecological Aspects. 330 $aThis second, completely revised edition of ?Paleogene fossil birds? gives a comprehensive, updated overview of the avian fossil record from a geological period that lasted from the end-Cretaceous mass extinction event (66 million years ago) to the end of the Oligocene epoch (23 mya). Paleogene avifaunas are highly diversified and not only feature unusual archaic groups without close living relatives but also offer unique insights into the evolution and biogeographic history of extant birds. The main body of the book constitutes an in-depth survey of the known diversity of Paleogene avifaunas. The reader is introduced into basic skeletal features of extinct avian taxa, with these fossil forms being placed into a phylogenetic context in the light of current hypotheses on the interrelationships of extant birds. The geographical and temporal occurrences of the various fossil groups are outlined and their evolutionary significance is discussed. Concluding sections inform more general aspects of Paleogene avifaunas, such as possible causes of major faunal changes. In addition to being a reference work for the early evolution of modern birds from a paleornithological perspective, the present work also enables researchers in other fields of vertebrate paleontology to gain an improved understanding of Paleogene ecosystems. Numerous color photos of representative specimens furthermore make the new edition attractive to a wider audience interested in the avian fossil record. 410 0$aFascinating Life Sciences,$x2509-6753 606 $aVertebrates 606 $aPaleontology 606 $aEvolution (Biology) 606 $aAnatomy, Comparative 606 $aVertebrate Zoology 606 $aPaleontology 606 $aEvolutionary Biology 606 $aAnimal Anatomy 615 0$aVertebrates. 615 0$aPaleontology. 615 0$aEvolution (Biology) 615 0$aAnatomy, Comparative. 615 14$aVertebrate Zoology. 615 24$aPaleontology. 615 24$aEvolutionary Biology. 615 24$aAnimal Anatomy. 676 $a568 676 $a568 700 $aMayr$b Gerald$0996071 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 912 $a9910544859403321 996 $aPaleogene Fossil Birds$92769521 997 $aUNINA