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101 0 $aeng
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181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 00$aAdvanced MEMS/NEMS fabrication and sensors /$fZhuoqing Yang, editor
210  1$aCham, Switzerland :$cSpringer,$d[2022]
210  4$dİ2022
215   $a1 online resource (312 pages)
311   $a3-030-79748-1 
606   $aMicroelectromechanical systems
606   $aNanoelectromechanical systems
606   $aMicrofabrication
615  0$aMicroelectromechanical systems.
615  0$aNanoelectromechanical systems.
615  0$aMicrofabrication.
676   $a621.381
702   $aYang$b Zhuoqing
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906   $aBOOK
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996   $aAdvanced MEMS$92595226
997   $aUNINA