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010   $a3-030-79749-X
024 7 $a10.1007/978-3-030-79749-2
035   $a(CKB)5100000000044194
035   $a(MiAaPQ)EBC6767926
035   $a(Au-PeEL)EBL6767926
035   $a(OCoLC)1281985431
035   $a(PPN)258301988
035   $a(DE-He213)978-3-030-79749-2
035   $a(EXLCZ)995100000000044194
100   $a20211012d2022      u|         0
101 0 $aeng
135   $aurcnu||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$aAdvanced MEMS/NEMS Fabrication and Sensors /$fedited by Zhuoqing Yang
205   $a1st ed. 2022.
210  1$aCham :$cSpringer International Publishing :$cImprint: Springer,$d2022.
215   $a1 online resource (312 pages)
225 1 $aEngineering Series
311 08$a3-030-79748-1 
327   $aTip-based Nanofabrication for MEMS Devices -- 1D-Nanostructured Piezoresistive Microcantilever for Environmental Sensing -- Application of Non-template Special Nanostructure Fabrication Technology in Sensors -- Composite Micro-machining Technology on the Non-silicon MEMS -- Nano-in-Nano Integration for Nanofluidics -- Bionanoscaffolds-enabled Micro/Nanofabrication and Devices -- NEMS Sensors Based on Novel Nanomaterials -- Microfluidic Sensors in Surface Channel Technology -- MOEMS-enabled Miniaturized Biomedical Sensing and Imaging System -- Bio-inspired Flexible Sensors for Flow Field Detection -- Ultrasound MEMS for Biosensing and Biomedical Imaging -- Optofluidic Devices for Bio-analytical Applications.
330   $aThis book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development. Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors; Covers a broad spectrum of sensor applications; Written by leading experts in the field.
410  0$aEngineering Series
606   $aMicrotechnology
606   $aMicroelectromechanical systems
606   $aElectronics
606   $aCooperating objects (Computer systems)
606   $aMaterials
606   $aMicrosystems and MEMS
606   $aElectronics and Microelectronics, Instrumentation
606   $aCyber-Physical Systems
606   $aMaterials Engineering
615  0$aMicrotechnology.
615  0$aMicroelectromechanical systems.
615  0$aElectronics.
615  0$aCooperating objects (Computer systems)
615  0$aMaterials.
615 14$aMicrosystems and MEMS.
615 24$aElectronics and Microelectronics, Instrumentation.
615 24$aCyber-Physical Systems.
615 24$aMaterials Engineering.
676   $a621.381
702   $aYang$b Zhuoqing
801  0$bMiAaPQ
801  1$bMiAaPQ
801  2$bMiAaPQ
906   $aBOOK
912   $a9910522964803321
996   $aAdvanced MEMS$92595226
997   $aUNINA