LEADER 05187nam 22006373u 450 001 9910510584003321 005 20250804213712.0 010 $a9783658359263 010 $a3658359269 035 $a(CKB)5100000000115749 035 $aEBL6811601 035 $a(AU-PeEL)EBL6811601 035 $a(MiAaPQ)EBC6811601 035 $a(oapen)https://directory.doabooks.org/handle/20.500.12854/74907 035 $a(PPN)258845538 035 $a(Au-PeEL)EBL6811601 035 $a(OCoLC)1321791975 035 $a(ODN)ODN0010068029 035 $a(oapen)doab74907 035 $a(EXLCZ)995100000000115749 100 $a20220617d2021|||| u|| | 101 0 $aeng 135 $aur|n|---||||| 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 10$aDevelopment and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry 205 $a1st ed. 210 $aWiesbaden $cSpringer Fachmedien Wiesbaden GmbH$d2021 215 $a1 online resource (180 p.) 300 $aDescription based upon print version of record. 311 08$a9783658359256 311 08$a3658359250 327 $aIntro -- Acknowledgements -- Abstract -- Contents -- List of Symbols -- List of Figures -- List of Tables -- 1 Introduction and Motivation -- 2 Related Works and Basic Considerations -- 2.1 Profilometry -- 2.1.1 Atomic Force Microscopy -- 2.1.2 Confocal Laser Scanning Microscopy -- 2.1.3 Digital Holographic Microscopy -- 2.1.4 Phase-shifting Interferometry -- 2.1.5 Coherence Scanning Interferometry -- 2.1.6 Low-coherence Interferometry -- 2.2 Polymer Cross-linking Characterization -- 2.2.1 Soxhlet-type Extraction -- 2.2.2 Differential Scanning Caliometry -- 2.2.3 Dynamic Mechanical Analysis -- 2.2.4 Spectroscopy-based Methods -- 2.2.5 Low-coherence Interferometry and Other Optical Methods -- 2.2.6 Spatially-resolved Approaches -- 2.3 Film Thickness Measurement -- 2.3.1 Spectral Reflectometry -- 2.3.2 Spectroscopic Ellipsometry -- 2.4 Material dispersion -- 2.4.1 Thermo-optic coefficient -- 2.4.2 Photo-elastic influences -- 2.4.3 Characterization of dispersion -- 3 Surface Profilometry -- 3.1 Experimental Setup -- 3.2 Measurement Range and Resolution -- 3.3 Signal Formation and Analysis -- 3.3.1 Fitting of Oscillating Data -- 3.3.2 Frequency Analysis -- 3.3.3 Two-Stage Fitting -- 3.3.4 Error Estimation of the Data Processing -- 3.4 Two-Dimensional Approach and Characterization -- 3.4.1 Height Standard Evaluation -- 3.4.2 Repeatability and Resolution Characterization -- 3.4.3 Edge Effects -- 3.4.4 Roughness Evaluation -- 3.4.5 High-Dynamic Range Measurements -- 3.4.6 Dual-Channel Approach -- 3.5 Areal Measurement Approaches -- 3.5.1 Translation-Based Areal Information -- 3.5.2 Alternative Spectral Encoding for Areal Measurements -- 4 Polymer Characterization -- 4.1 Temporal Approach -- 4.2 Scan-free Approach -- 4.2.1 Wrapped-phase Derivative Evaluation (WPDE) -- 4.2.2 Spatially-resolved Approaches -- 4.3 Influences and Limitations. 327 $a4.3.1 Error Parameters of the Temporal Approach -- 4.3.2 Error Propagation in WPDE -- 5 Thin-film Characterization -- 5.1 Setup Considerations -- 5.2 Characterization of Thin-films on Bulk Substrates -- 5.3 Characterization of Flexible Substrate Materials -- 6 Conclusion -- A Glossary -- Publications -- Bibliography. 330 $aThis Open Access book discusses an extension to low-coherence interferometry by dispersion-encoding. The approach is theoretically designed and implemented for applications such as surface profilometry, polymeric cross-linking estimation and the determination of thin-film layer thicknesses. During a characterization, it was shown that an axial measurement range of 79.91 µm with an axial resolution of 0.1 nm is achievable. Simultaneously, profiles of up to 1.5 mm in length were obtained in a scan-free manner. This marked a significant improvement in relation to the state-of-the-art in terms of dynamic range. Also, the axial and lateral measurement range were decoupled partially while functional parameters such as surface roughness were estimated. The characterization of the degree of polymeric cross-linking was performed as a function of the refractive index. It was acquired in a spatially-resolved manner with a resolution of 3.36 x 10-5. This was achieved by the development of a novel mathematical analysis approach. 606 $aOptical physics$2bicssc 606 $aMensuration & systems of measurement$2bicssc 610 $asurface metrology 610 $aprofilometry 610 $ainterferometry 610 $alow-coherence interferometry 610 $asemiconductor manufacturing 610 $aoptical metrology 610 $aOpen Access 615 7$aOptical physics 615 7$aMensuration & systems of measurement 686 $aSCI053000$aTEC022000$2bisacsh 700 $aTaudt$b Christopher$01238694 801 0$bAU-PeEL 801 1$bAU-PeEL 801 2$bAU-PeEL 906 $aBOOK 912 $a9910510584003321 996 $aDevelopment and Characterization of a Dispersion-Encoded Method for Low-Coherence Interferometry$92874619 997 $aUNINA