LEADER 04576nam 22007695 450 001 9910508456103321 005 20230822193733.0 010 $a3-030-63647-X 024 7 $a10.1007/978-3-030-63647-0 035 $a(CKB)4940000000616532 035 $a(MiAaPQ)EBC6796745 035 $a(Au-PeEL)EBL6796745 035 $a(OCoLC)1283853727 035 $a(DE-He213)978-3-030-63647-0 035 $a(PPN)258300795 035 $a(EXLCZ)994940000000616532 100 $a20211031d2021 u| 0 101 0 $aeng 135 $aurcnu|||||||| 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 10$aHandbook of Laser Micro- and Nano-Engineering /$fedited by Koji Sugioka 205 $a1st ed. 2021. 210 1$aCham :$cSpringer International Publishing :$cImprint: Springer,$d2021. 215 $a1 online resource (2085 pages) 311 $a3-030-63646-1 327 $aIntroduction -- Fundamentals of Laser-Matter Interaction -- Laser Systems -- Optics & Processing Apparatus -- Modification & Surface Structuring -- Material Removal & Subtractive Processing -- Material Deposition & -- Diagnostics, Monitoring & Measurement Techniques -- Practical & Commercial Applications -- Appendices -- Index. 330 $aThis handbook provides a comprehensive review of the entire field of laser micro and nano processing, including not only a detailed introduction to individual laser processing techniques but also the fundamentals of laser-matter interaction and lasers, optics, equipment, diagnostics, as well as monitoring and measurement techniques for laser processing. Consisting of 11 sections, each composed of 4 to 6 chapters written by leading experts in the relevant field. Each main part of the handbook is supervised by its own part editor(s) so that high-quality content as well as completeness are assured. The book provides essential scientific and technical information to researchers and engineers already working in the field as well as students and young scientists planning to work in the area in the future. Lasers found application in materials processing practically since their invention in 1960, and are currently used widely in manufacturing. The main driving force behind this fact is that the lasers can provide unique solutions in material processing with high quality, high efficiency, high flexibility, high resolution, versatility and low environmental load. Macro-processing based on thermal process using infrared lasers such as CO2 lasers has been the mainstream in the early stages, while research and development of micro- and nano-processing are becoming increasingly more active as short wavelength and/or short pulse width lasers have been developed. In particular, recent advances in ultrafast lasers have opened up a new avenue to laser material processing due to the capabilities of ultrahigh precision micro- and nanofabrication of diverse materials. This handbook is the first book covering the basics, the state-of-the-art and important applications of the dynamic and rapidly expanding discipline of laser micro- and nanoengineering. This comprehensive source makes readers familiar with a broad spectrum of approaches to solve all relevant problems in science and technology. This handbook is the ultimate desk reference for all people working in the field. 606 $aLasers 606 $aMicrotechnology 606 $aMicroelectromechanical systems 606 $aNanotechnology 606 $aPhysics 606 $aAstronomy 606 $aSurfaces (Physics) 606 $aMaterials 606 $aLaser 606 $aMicrosystems and MEMS 606 $aNanotechnology 606 $aPhysics and Astronomy 606 $aSurface and Interface and Thin Film 606 $aMaterials Engineering 615 0$aLasers. 615 0$aMicrotechnology. 615 0$aMicroelectromechanical systems. 615 0$aNanotechnology. 615 0$aPhysics. 615 0$aAstronomy. 615 0$aSurfaces (Physics). 615 0$aMaterials. 615 14$aLaser. 615 24$aMicrosystems and MEMS. 615 24$aNanotechnology. 615 24$aPhysics and Astronomy. 615 24$aSurface and Interface and Thin Film. 615 24$aMaterials Engineering. 676 $a621.366 676 $a621.366 702 $aSugioka$b Ko?ji 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9910508456103321 996 $aHandbook of Laser Micro- and Nano-Engineering$91879904 997 $aUNINA