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100   $a20211020d2021      uy             0
101 0 $aeng
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181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$aDesign and development of MEMS based guided beam type piezoelectric energy harvester /$fShanky Saxena, Ritu Sharma, B.D. Pant
210  1$aSingapore :$cSpringer,$d[2021]
210  4$dİ2021
215   $a1 online resource (204 pages)
225 1 $aEnergy Systems in Electrical Engineering
311   $a981-16-0605-6 
410  0$aEnergy systems in electrical engineering.
606   $aPiezoelectric devices$xDesign and construction
606   $aMicroelectromechanical systems$xDesign and construction
615  0$aPiezoelectric devices$xDesign and construction.
615  0$aMicroelectromechanical systems$xDesign and construction.
676   $a621.43
700   $aSaxena$b Shanky$0849981
702   $aSharma$b Ritu
702   $aPant$b B. D.
801  0$bMiAaPQ
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801  2$bMiAaPQ
906   $aBOOK
912   $a9910484300703321
996   $aDesign and development of MEMS based guided beam type piezoelectric energy harvester$91897926
997   $aUNINA