LEADER 02660oam 2200505 450 001 9910483391503321 005 20220912173722.0 010 $a3-030-61652-5 024 7 $a10.1007/978-3-030-61652-6 035 $a(CKB)4100000011508825 035 $a(MiAaPQ)EBC6381324 035 $a(DE-He213)978-3-030-61652-6 035 $a(PPN)258088397 035 $a(EXLCZ)994100000011508825 100 $a20210415d2021 uy 0 101 0 $aeng 135 $aurnn#---mamaa 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 00$aMicroactuators, microsensors and micromechanisms $eMAMM 2020, Ilmenau, Germany, November 2020 /$feditors, Lena Zentner, Steffen Strehle 205 $a1st edition 2021. 210 1$aCham, Switzerland :$cSpringer,$d[2021] 210 4$dİ2021 215 $a1 online resource (VIII, 149 p. 50 illus.) 225 1 $aMechanisms and Machine Science,$x2211-0984 ;$v96 300 $aIncludes index. 311 1 $a3-030-61651-7 330 $aThis book brings together investigations which combine theoretical and experimental results related to such systems as flexure hinges and compliant mechanisms for precision applications, the non-linear analytical modeling of compliant mechanisms, mechanical systems using compliance as a bipedal robot and reconfigurable tensegrity systems and micro-electro-mechanical systems (MEMS) as energy efficient micro-robots, microscale force compensation, magnetoelectric micro-sensors, acoustical actuators and the wafer bonding as a key technology for the MEMS fabrication. The volume gathers twelve contributions presented at the 5th Conference on Microactuators, Microsensors and Micromechanisms (MAMM), held in Ilmenau, Germany in November 2020. The aim of the conference was to provide a special opportunity for a know-how exchange and collaboration in various disciplines concerning systems pertaining to micro-technology. The conference was organized under the patronage of IFToMM (International Federation for the Promotion of Mechanism and Machine Science). 410 0$aMechanisms and Machine Science,$x2211-0984 ;$v96 606 $aMicroactuators$vCongresses 606 $aMicroelectromechanical systems$vCongresses 615 0$aMicroactuators 615 0$aMicroelectromechanical systems 676 $a621.381 702 $aZentner$b Lena$f1964- 702 $aStrehle$b Steffen 712 12$aMAMM (Workshop) 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bUtOrBLW 906 $aBOOK 912 $a9910483391503321 996 $aMicroactuators, microsensors and micromechanisms$92846515 997 $aUNINA