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100   $a20100506d2010      uy             0
101 0 $aeng
135   $aur|n|---|||||
181   $ctxt
182   $cc
183   $acr
200 10$aLow-k nanoporous interdielectrics$b[electronic resource] $ematerials, thin film fabrications, structures and properties /$fMoonhor Ree, Jinhwan Yoon and Kyuyoung Heo
210   $aHauppauge, N.Y. $cNova Science Publishers$dc2010
215   $a1 online resource (77 p.)
225 1 $aNanotechnology science and technology
300   $aDescription based upon print version of record.
311   $a1-61668-749-5 
320   $aIncludes bibliographical references (p. [51]-61) and index.
410  0$aNanotechnology science and technology series.
606   $aDielectric films
606   $aMicroelectronics$xMaterials
606   $aPorous materials
606   $aInterconnects (Integrated circuit technology)
608   $aElectronic books.
615  0$aDielectric films.
615  0$aMicroelectronics$xMaterials.
615  0$aPorous materials.
615  0$aInterconnects (Integrated circuit technology)
676   $a621.381
700   $aRee$b Moonhor$0991064
701   $aYoon$b Jinhwan$0991065
701   $aHeo$b Kyuyoung$0991066
801  0$bMiAaPQ
801  1$bMiAaPQ
801  2$bMiAaPQ
906   $aBOOK
912   $a9910461354803321
996   $aLow-k nanoporous interdielectrics$92267930
997   $aUNINA