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010   $a0-8155-1988-5
010   $a9786612541148
010   $a0-08-094772-7
010   $a1-282-54114-5
035   $a(CKB)3710000000469719
035   $a(EBL)534865
035   $a(OCoLC)667288128
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035   $a(PQKBTitleCode)TC0000419278
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035   $a(MiAaPQ)EBC534865
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100   $a20090710d2010      uy             0
101 0 $aeng
135   $aur|n|---|||||
181   $ctxt
182   $cc
183   $acr
200 00$aHandbook of silicon based MEMS materials and technologies$b[electronic resource] /$fVeikko Lindroos ... [et al.]
205   $a1st ed.
210   $aAmsterdam ;$aBoston $cWilliam Andrew/Elsevier$d2010
215   $a1 online resource (669 p.)
225 1 $aMicro & nano technologies
300   $aDescription based upon print version of record.
311   $a0-8155-1594-4 
320   $aIncludes bibliographical references and index.
330   $aA comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications.   Key topics covered include:    Silicon as MEMS materialMaterial properties and measurement techniquesAnalytical methods used in materials characterizationModeling in MEMSMeasuring MEMSMicromachining technologies in MEMSEncapsulation of MEMS componentsEmerging process technologies, including ALD and porous silicon   Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well
410  0$aMicro & nano technologies.
606   $aMicroelectromechanical systems
606   $aMicroelectromechanical systems$xMaterials
606   $aSilicon$xElectric properties
608   $aElectronic books.
615  0$aMicroelectromechanical systems.
615  0$aMicroelectromechanical systems$xMaterials.
615  0$aSilicon$xElectric properties.
676   $a621.38152
701   $aLindroos$b Veikko$0934870
801  0$bMiAaPQ
801  1$bMiAaPQ
801  2$bMiAaPQ
906   $aBOOK
912   $a9910461081503321
996   $aHandbook of silicon based MEMS materials and technologies$92105284
997   $aUNINA