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010   $a1-4200-5518-6
010   $a1-4398-9524-4
024 7 $a10.1201/9781439895245 
035   $a(CKB)3710000000391173
035   $a(EBL)1446478
035   $a(MiAaPQ)EBC1446478
035   $a(Au-PeEL)EBL1446478
035   $a(CaPaEBR)ebr11166029
035   $a(OCoLC)908077533
035   $a(OCoLC)958799057
035   $a(EXLCZ)993710000000391173
100   $a20180706d2011      uy             0
101 0 $aeng
135   $aur|n|---|||||
181   $2rdacontent
182   $2rdamedia
183   $2rdacarrier
200 10$aFrom MEMS to bio-MEMS and bio-NEMS manufacturing techniques and applications /$fby Marc J. Madou
205   $aThird edition.
210  1$aBoca Raton, FL :$cCRC Press, an imprint of Taylor and Francis,$d2011.
215   $a1 online resource (642 p.)
300   $aDescription based upon print version of record.
311   $a1-4200-5516-X 
320   $aIncludes bibliographical references at the end of each chapters.
327   $aFront Cover; Contents; Roadmap; Author; Acknowledgments; Chapter 1: Nonlithography-Based (Traditional) and Lithography-Based (Nontraditional) Manufacturing Compared; Chapter 2: Nature as an Engineering Guide: Biomimetics; Chapter 3: Nanotechnology: Top-Down and Bottom-Up Manufacturing Approaches Compared; Chapter 4: Packaging, Assembly, and Self-Assembly; Chapter 5: Selected Materials and Processes for MEMS and NEMS; Chapter 6: Metrology and MEMS/NEMS Modeling; Chapter 7: Scaling Laws; Chapter 8: Actuators; Chapter 9: Power and Brains in Miniature Devices
327   $aChapter 10: MEMS and NEMS ApplicationsBack Cover
330 3 $aFrom MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature devices. He concludes with coverage of various MEMS and NEMS applications. Fully illustrated in color, the text contains end-of-chapter problems, worked examples, extensive references for further reading, and an extensive glossary of terms.
606   $aMicroelectromechanical systems
606   $aNanoelectromechanical systems
606   $aMicrofluidics
606   $aSolid state physics
608   $aElectronic books.
615  0$aMicroelectromechanical systems.
615  0$aNanoelectromechanical systems.
615  0$aMicrofluidics.
615  0$aSolid state physics.
676   $a620.5
700   $aMadou$b Marc J.$0850422
801  0$bMiAaPQ
801  1$bMiAaPQ
801  2$bMiAaPQ
906   $aBOOK
912   $a9910460580203321
996   $aFrom MEMS to bio-MEMS and bio-NEMS manufacturing techniques and applications$91898779
997   $aUNINA