LEADER 02680nam 2200637 450 001 9910451030803321 005 20200520144314.0 010 $a1-58053-872-X 035 $a(CKB)1000000000340580 035 $a(EBL)227696 035 $a(OCoLC)63045717 035 $a(SSID)ssj0000182731 035 $a(PQKBManifestationID)11156115 035 $a(PQKBTitleCode)TC0000182731 035 $a(PQKBWorkID)10172303 035 $a(PQKB)10548485 035 $a(MiAaPQ)EBC227696 035 $a(Au-PeEL)EBL227696 035 $a(CaPaEBR)ebr10081913 035 $a(OCoLC)57033175 035 $a(CaBNVSL)mat09100712 035 $a(IEEE)9100712 035 $a(EXLCZ)991000000000340580 100 $a20200729d2004 uy 101 0 $aeng 135 $aur|n|---||||| 181 $ctxt 182 $cc 183 $acr 200 10$aIntroduction to microelectromechanical microwave systems /$fHe?ctor J. de los Santos 205 $a2nd ed. 210 1$aBoston :$cArtech House,$dİ2004. 210 2$a[Piscataqay, New Jersey] :$cIEEE Xplore,$d[2004] 215 $a1 online resource (235 p.) 225 1 $aArtech House MEMS and sensors library 300 $aDescription based upon print version of record. 311 $a1-58053-871-1 320 $aIncludes bibliographical references and index. 327 $aIntroduction to Microelectromechanical Microwave Systems; Contents; Preface xi; Acknowledgments xxi; 1 Microelectromechanical Systems 1; 2 Fundamental MEMS Device Physics 25; 3 Fundamental MEMS Devices: The MEM Switch 59; 4 Fundamental MEMS Devices: The MEM Resonator 87; 5 Microwave MEMS Applications 121; 6 MEMS-Based Microwave Circuits and Systems 173; Glossary 209; About the Author 211; Index 213 330 8 $aAnnotation The second edition covers the latest in fabrication technologies, actuation mechanisms, packaging, switching, resonator design, and microwave and wireless applications. This practical book steers readers past the drawbacks and towards the benefits of integrating RF/microwave MEMS into communications equipment. 410 0$aArtech House MEMS and sensors library. 410 0$aMicroelectromechanical systems series. 606 $aMicrowave devices 606 $aMicroelectromechanical systems 608 $aElectronic books. 615 0$aMicrowave devices. 615 0$aMicroelectromechanical systems. 676 $a621.381/3 700 $aSantos$b He?ctor J. de los$0720916 801 0$bCaBNVSL 801 1$bCaBNVSL 801 2$bCaBNVSL 906 $aBOOK 912 $a9910451030803321 996 $aIntroduction to microelectromechanical microwave systems$92170334 997 $aUNINA