LEADER 02211nam  2200613   450 
001 9910450101903321
005 20200520144314.0
010   $a1-58053-873-8
035   $a(CKB)1000000000210007
035   $a(EBL)231651
035   $a(OCoLC)70733931
035   $a(SSID)ssj0000201171
035   $a(PQKBManifestationID)11190123
035   $a(PQKBTitleCode)TC0000201171
035   $a(PQKBWorkID)10231402
035   $a(PQKB)11206711
035   $a(MiAaPQ)EBC231651
035   $a(Au-PeEL)EBL231651
035   $a(CaPaEBR)ebr10081990
035   $a(OCoLC)55895606
035   $a(CaBNVSL)mat09100080
035   $a(IEEE)9100080
035   $a(EXLCZ)991000000000210007
100   $a20200729d2004      uy              
101 0 $aeng
135   $aur|n|---|||||
181   $ctxt
182   $cc
183   $acr
200 00$aMEMS mechanical sensors /$fStephen Beeby [and others]
210  1$aBoston :$cArtech House,$dİ2004.
210  2$a[Piscataqay, New Jersey] :$cIEEE Xplore,$d[2004]
215   $a1 online resource (280 p.)
225 1 $aArtech House microelectromechanical systems (MEMS) series
300   $aDescription based upon print version of record.
311   $a1-58053-536-4 
320   $aIncludes bibliographical references and index.
327   $aMachine generated contents note: Ch. 1 Introduction -- Ch. 2 Materials and fabrication techniques -- Ch. 3 MEMS simulation and design tools -- Ch. 4 Mechanical sensor packaging -- Ch. 5
330 8 $aAnnotation$bEngineers and researchers can turn to this reference time and time again when they need to overcome challenges in design, simulation, fabrication, and application of MEMS (microelectromechanical systems) sensors.
410  0$aMicroelectromechanical systems series.
606   $aMicroelectromechanical systems
606   $aDetectors
608   $aElectronic books.
615  0$aMicroelectromechanical systems.
615  0$aDetectors.
676   $a681/.2
701   $aBeeby$b Stephen$0906474
801  0$bCaBNVSL
801  1$bCaBNVSL
801  2$bCaBNVSL
906   $aBOOK
912   $a9910450101903321
996   $aMEMS mechanical sensors$92183313
997   $aUNINA