LEADER 00873nam0-22003131i-450- 001 990008017880403321 005 20101104172605.0 010 $a88-8058-693-9 035 $a000801788 035 $aFED01000801788 035 $a(Aleph)000801788FED01 035 $a000801788 100 $a20050304d2004----km-y0itay50------ba 101 0 $aita 102 $aIT 105 $aa-------001yy 200 1 $a<>soglia$evita, carcere, teatro$ffotografia di Paolo Ranzani 210 $aSavigliano (Cn)$cGribaudo$d2004 215 $a127 p.$cill.$d24 cm 610 0 $aDetenenuti$aFotografie 676 $a778.9$v21$zita 700 1$aRanzani,$bPaolo$f<1966- >$0434746 801 0$aIT$bUNINA$c20050304$gRICA$2UNIMARC 901 $aBK 912 $a990008017880403321 952 $a778.9 RAN 1$bBibl. 49967$fFLFBC 959 $aFLFBC 996 $aSoglia$9754181 997 $aUNINA LEADER 03371nam 2200637Ia 450 001 9910437881603321 005 20200520144314.0 010 $a1-283-63155-5 010 $a9786613944009 010 $a3-642-31776-6 024 7 $a10.1007/978-3-642-31776-7 035 $a(CKB)2670000000257099 035 $a(EBL)1030434 035 $a(OCoLC)809261223 035 $a(SSID)ssj0000746057 035 $a(PQKBManifestationID)11411487 035 $a(PQKBTitleCode)TC0000746057 035 $a(PQKBWorkID)10863288 035 $a(PQKB)11209956 035 $a(DE-He213)978-3-642-31776-7 035 $a(MiAaPQ)EBC1030434 035 $a(PPN)168320304 035 $a(EXLCZ)992670000000257099 100 $a20120906d2013 uy 0 101 0 $aeng 135 $aur|n|---||||| 181 $ctxt 182 $cc 183 $acr 200 10$aMultilayer integrated film bulk acoustic resonators /$fYafei Zhang, Da Chen 205 $a1st ed. 2013. 210 $aBerlin ;$aNew York $cSpringer ;$aShanghai $cShanghai Jiao Tong University Press$dc2013 215 $a1 online resource (158 p.) 300 $aDescription based upon print version of record. 311 $a3-642-42755-3 311 $a3-642-31775-8 320 $aIncludes bibliographical references and index. 327 $aIntroduction -- Propagation of Acoustic Wave in Crystals -- The Theory of FBAR -- The Sputtering Deposition and Etching of AlN Film -- The Membrane Structured FBAR -- Solidly Mounted Acoustic Resonator -- The Application of FBAR in RF Filters -- The FBAR Excited by Lateral Filed -- High Sensitive Sensors Based on FBAR. 330 $aMultilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices. Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices. Prof. Yafei Zhang is the director of the Ministry of Education?s Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang?s research group. 606 $aRadio resonators$xDesign and construction 606 $aRadio frequency integrated circuits$xDesign and construction 606 $aThin films, Multilayered 615 0$aRadio resonators$xDesign and construction. 615 0$aRadio frequency integrated circuits$xDesign and construction. 615 0$aThin films, Multilayered. 676 $a612 700 $aZhang$b Yafei$01058827 701 $aChen$b Da$01755329 712 02$aShanghai jiao tong da xue.$bChu ban she, 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9910437881603321 996 $aMultilayer integrated film bulk acoustic resonators$94192061 997 $aUNINA