LEADER 03105oam 2200505 450 001 9910437766803321 005 20190911103512.0 010 $a1-4614-8517-7 024 7 $a10.1007/978-1-4614-8517-9 035 $a(OCoLC)864164576 035 $a(MiFhGG)GVRL6YNE 035 $a(EXLCZ)993710000000024297 100 $a20130705d2013 uy 0 101 0 $aeng 135 $aurun|---uuuua 181 $ctxt 182 $cc 183 $acr 200 10$aPiezoresistor design and applications /$fJoseph C. Doll, Beth L. Pruitt 205 $a1st ed. 2013. 210 1$aNew York :$cSpringer,$d2013. 215 $a1 online resource (xi, 245 pages) $cillustrations (some color) 225 1 $aMicrosystems and Nanosystems,$x2198-0063 300 $aDescription based upon print version of record. 311 $a1-4614-8516-9 320 $aIncludes bibliographical references. 327 $aIntroduction -- Piezoresistance fundamentals -- Sensitivity, noise and resolution -- Fabrication and process modeling -- Temperature effects -- Design optimization -- Alternative materials and transduction methods. 330 $aThis book is a comprehensive guide to piezoresistive MEMS sensor design. Piezoresistors transduce mechanical loads into electrical signals via a resistance change, and comprise a substantial portion of the commercial MEMS sensors market. Applications of piezoresistors include strain gauges, accelerometers, pressure sensors, force sensors, chemical sensors and resonators. This book also: ·         Demonstrates how the latest piezoresistor models and optimization techniques can be integrated for high performance piezoresistor design ·         Covers in detail piezoresistor sensitivity and noise models, signal conditioning, fabrication processes, low-power design and numerical optimization techniques ·         Provides an up-to-date discussion of alternative piezoresistive materials and MEMS transduction techniques ·         Explores in detail the tradeoffs in size, performance and complexity between piezoresistive sensing and popular alternatives (capacitive, piezoelectric and optical transduction) Piezoresistor Design and Applications addresses all aspects of piezoresistor design, fabrication, modeling and optimization and is an ideal book for MEMS designers, process engineers and researchers. 410 0$aMicrosystems and nanosystems. 606 $aPiezoelectric devices$xDesign and construction 606 $aElectric resistors 606 $aMicroelectromechanical systems$xDesign and construction 615 0$aPiezoelectric devices$xDesign and construction. 615 0$aElectric resistors. 615 0$aMicroelectromechanical systems$xDesign and construction. 676 $a620.1 676 $a621.3815 700 $aDoll$b Joseph C$4aut$4http://id.loc.gov/vocabulary/relators/aut$01060866 702 $aPruitt$b Beth 801 0$bMiFhGG 801 1$bMiFhGG 906 $aBOOK 912 $a9910437766803321 996 $aPiezoresistor Design and Applications$92515983 997 $aUNINA