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010   $a3-030-33073-7
024 7 $a10.1007/978-3-030-33073-6
035   $a(CKB)4100000009939801
035   $a(MiAaPQ)EBC5984853
035   $a(DE-He213)978-3-030-33073-6
035   $a(PPN)24860483X
035   $a(EXLCZ)994100000009939801
100   $a20191125d2019      u|         0
101 0 $aeng
135   $aurcnu||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$aDIY MEMS $eFabricating Microelectromechanical Systems in Open Use Labs /$fby Deborah Munro
205   $a1st ed. 2019.
210  1$aCham :$cSpringer International Publishing :$cImprint: Springer,$d2019.
215   $a1 online resource (xvi, 188 pages) $cillustrations
311 08$a3-030-33072-9 
327   $aIntroduction -- National Nanotechnology Coordinated Infrastructure (NNCI) -- Working in a Cleanroom -- MEMS Fabrication Process -- Equipment -- Tools and Supplies -- Designing for MEMS -- Soft Materials -- Imaging & Metrology -- Testing -- Transporting -- Regulatory Approval Pathways -- Locations of the Facilities -- Meet the Lab Directors -- Collaborating with a Facility -- International Options -- Intellectual Property -- Getting Project Assistance -- Costs -- Taking the First Steps.
330   $aThis book describes the future of microscopically small medical devices and how to locate a lab to start conducting your own do-it-yourself microelectromechanical systems (MEMS) research in one of the many national, international, government, and other regional open use facilities, where you can quickly begin designing and fabricating devices for your applications. You will learn specific, tangible information on what MEMS are and how a device is fabricated, including what the main types of equipment are in these facilities. The book provides advice on working in a cleanroom, soft materials, collaboration, intellectual property and privacy issues, regulatory compliance, and how to navigate other issues that may arise. This book is primarily aimed at researchers and students who work at universities without MEMS facilities, and small companies who need access to MEMS resources. Introduces the MEMS fabrication processes and equipment Explains how totake the first steps - where to start and get initial advice and further assistance Includes a global list of MEMS facilities and resources with contact information.
606   $aElectronic circuits
606   $aElectronics
606   $aBiotechnology
606   $aMicrotechnology
606   $aMicroelectromechanical systems
606   $aIndustrial engineering
606   $aProduction engineering
606   $aElectronic Circuits and Systems
606   $aElectronics and Microelectronics, Instrumentation
606   $aBiotechnology
606   $aMicrosystems and MEMS
606   $aIndustrial and Production Engineering
615  0$aElectronic circuits.
615  0$aElectronics.
615  0$aBiotechnology.
615  0$aMicrotechnology.
615  0$aMicroelectromechanical systems.
615  0$aIndustrial engineering.
615  0$aProduction engineering.
615 14$aElectronic Circuits and Systems.
615 24$aElectronics and Microelectronics, Instrumentation.
615 24$aBiotechnology.
615 24$aMicrosystems and MEMS.
615 24$aIndustrial and Production Engineering.
676   $a620.5
700   $aMunro$b Deborah$4aut$4http://id.loc.gov/vocabulary/relators/aut$0837075
801  0$bMiAaPQ
801  1$bMiAaPQ
801  2$bMiAaPQ
906   $aBOOK
912   $a9910373930403321
996   $aDIY MEMS$92497015
997   $aUNINA