LEADER 00773nam0-22003011i-450- 001 990000573700403321 005 20001010 035 $a000057370 035 $aFED01000057370 035 $a(Aleph)000057370FED01 035 $a000057370 100 $a20001010d--------km-y0itay50------ba 101 0 $aita 105 $ay-------001yy 200 1 $aBEMESSUNGSVERFAHREN$fLOSER Benno 210 $aBerlin$cVerlag Von Wilhelm & Sohn$d1953 300 $a14 Auflage 610 0 $aScienza delle Costruzioni 610 0 $aCalcolo a Rottura 610 0 $aTeoria delle Strutture 700 1$aLoser,$bBenno 801 0$aIT$bUNINA$gRICA$2UNIMARC 901 $aBK 912 $a990000573700403321 952 $a07 A-12$b$fDINSC 959 $aDINSC 997 $aUNINA DB $aING01 LEADER 04225nam 22006855 450 001 9910373930403321 005 20200630011617.0 010 $a3-030-33073-7 024 7 $a10.1007/978-3-030-33073-6 035 $a(CKB)4100000009939801 035 $a(MiAaPQ)EBC5984853 035 $a(DE-He213)978-3-030-33073-6 035 $a(PPN)24860483X 035 $a(EXLCZ)994100000009939801 100 $a20191125d2019 u| 0 101 0 $aeng 135 $aurcnu|||||||| 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 10$aDIY MEMS $eFabricating Microelectromechanical Systems in Open Use Labs /$fby Deborah Munro 205 $a1st ed. 2019. 210 1$aCham :$cSpringer International Publishing :$cImprint: Springer,$d2019. 215 $a1 online resource (xvi, 188 pages) $cillustrations 311 $a3-030-33072-9 327 $aIntroduction -- National Nanotechnology Coordinated Infrastructure (NNCI) -- Working in a Cleanroom -- MEMS Fabrication Process -- Equipment -- Tools and Supplies -- Designing for MEMS -- Soft Materials -- Imaging & Metrology -- Testing -- Transporting -- Regulatory Approval Pathways -- Locations of the Facilities -- Meet the Lab Directors -- Collaborating with a Facility -- International Options -- Intellectual Property -- Getting Project Assistance -- Costs -- Taking the First Steps. 330 $aThis book describes the future of microscopically small medical devices and how to locate a lab to start conducting your own do-it-yourself microelectromechanical systems (MEMS) research in one of the many national, international, government, and other regional open use facilities, where you can quickly begin designing and fabricating devices for your applications. You will learn specific, tangible information on what MEMS are and how a device is fabricated, including what the main types of equipment are in these facilities. The book provides advice on working in a cleanroom, soft materials, collaboration, intellectual property and privacy issues, regulatory compliance, and how to navigate other issues that may arise. This book is primarily aimed at researchers and students who work at universities without MEMS facilities, and small companies who need access to MEMS resources. Introduces the MEMS fabrication processes and equipment Explains how to take the first steps - where to start and get initial advice and further assistance Includes a global list of MEMS facilities and resources with contact information. 606 $aElectronic circuits 606 $aElectronics 606 $aMicroelectronics 606 $aBiomedical engineering 606 $aNanotechnology 606 $aIndustrial engineering 606 $aProduction engineering 606 $aElectronic Circuits and Devices$3https://scigraph.springernature.com/ontologies/product-market-codes/P31010 606 $aElectronics and Microelectronics, Instrumentation$3https://scigraph.springernature.com/ontologies/product-market-codes/T24027 606 $aBiomedical Engineering/Biotechnology$3https://scigraph.springernature.com/ontologies/product-market-codes/B24000 606 $aNanotechnology and Microengineering$3https://scigraph.springernature.com/ontologies/product-market-codes/T18000 606 $aIndustrial and Production Engineering$3https://scigraph.springernature.com/ontologies/product-market-codes/T22008 615 0$aElectronic circuits. 615 0$aElectronics. 615 0$aMicroelectronics. 615 0$aBiomedical engineering. 615 0$aNanotechnology. 615 0$aIndustrial engineering. 615 0$aProduction engineering. 615 14$aElectronic Circuits and Devices. 615 24$aElectronics and Microelectronics, Instrumentation. 615 24$aBiomedical Engineering/Biotechnology. 615 24$aNanotechnology and Microengineering. 615 24$aIndustrial and Production Engineering. 676 $a620.5 700 $aMunro$b Deborah$4aut$4http://id.loc.gov/vocabulary/relators/aut$0837075 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9910373930403321 996 $aDIY MEMS$92497015 997 $aUNINA