LEADER 05476nam 22008415 450 001 9910373924903321 005 20200701221141.0 010 $a3-030-29454-4 024 7 $a10.1007/978-3-030-29454-0 035 $a(CKB)4900000000504985 035 $a(DE-He213)978-3-030-29454-0 035 $a(MiAaPQ)EBC6005117 035 $a(iGPub)SPNA0063191 035 $a(PPN)242843042 035 $a(EXLCZ)994900000000504985 100 $a20200101d2019 u| 0 101 0 $aeng 135 $aurnn|008mamaa 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 12$aA Practical Guide to Surface Metrology /$fby Michael Quinten 205 $a1st ed. 2019. 210 1$aCham :$cSpringer International Publishing :$cImprint: Springer,$d2019. 215 $a1 online resource (XXV, 230 p. 156 illus., 100 illus. in color.) 225 1 $aSpringer Series in Measurement Science and Technology,$x2198-7807 311 $a3-030-29453-6 320 $aIncludes bibliographical references and index. 327 $aPreface -- Introduction to Surfaces and Surface Metrology -- Tactile Surface Metrology -- Capacitive And Inductive Surface Metrology -- Optical Surface Metrology- Physical Basics -- Optical Surface Metrology - Methods -- Imaging Methods - Multisensor - Systems - A Versatile Approach To Surface Metrology -- Appendix -- Index. 330 $aThis book offers a genuinely practical introduction to the most commonly encountered optical and non-optical systems used for the metrology and characterization of surfaces, including guidance on best practice, calibration, advantages and disadvantages, and interpretation of results. It enables the user to select the best approach in a given context. Most methods in surface metrology are based upon the interaction of light or electromagnetic radiation (UV, NIR, IR), and different optical effects are utilized to get a certain optical response from the surface; some of them record only the intensity reflected or scattered by the surface, others use interference of EM waves to obtain a characteristic response from the surface. The book covers techniques ranging from microscopy (including confocal, SNOM and digital holographic microscopy) through interferometry (including white light, multi-wavelength, grazing incidence and shearing) to spectral reflectometry and ellipsometry. The non-optical methods comprise tactile methods (stylus tip, AFM) as well as capacitive and inductive methods (capacitive sensors, eddy current sensors). The book provides: Overview of the working principles Description of advantages and disadvantages Currently achievable numbers for resolutions, repeatability, and reproducibility Examples of real-world applications A final chapter discusses examples where the combination of different surface metrology techniques in a multi-sensor system can reasonably contribute to a better understanding of surface properties as well as a faster characterization of surfaces in industrial applications. The book is aimed at scientists and engineers who use such methods for the measurement and characterization of surfaces across a wide range of fields and industries, including electronics, energy, automotive and medical engineering. 410 0$aSpringer Series in Measurement Science and Technology,$x2198-7807 606 $aPhysical measurements 606 $aMeasurement    606 $aMaterials science 606 $aSurfaces (Physics) 606 $aInterfaces (Physical sciences) 606 $aThin films 606 $aMaterials?Surfaces 606 $aEngineering?Materials 606 $aLasers 606 $aPhotonics 606 $aMeasurement Science and Instrumentation$3https://scigraph.springernature.com/ontologies/product-market-codes/P31040 606 $aCharacterization and Evaluation of Materials$3https://scigraph.springernature.com/ontologies/product-market-codes/Z17000 606 $aSurface and Interface Science, Thin Films$3https://scigraph.springernature.com/ontologies/product-market-codes/P25160 606 $aSurfaces and Interfaces, Thin Films$3https://scigraph.springernature.com/ontologies/product-market-codes/Z19000 606 $aMaterials Engineering$3https://scigraph.springernature.com/ontologies/product-market-codes/T28000 606 $aOptics, Lasers, Photonics, Optical Devices$3https://scigraph.springernature.com/ontologies/product-market-codes/P31030 615 0$aPhysical measurements. 615 0$aMeasurement   . 615 0$aMaterials science. 615 0$aSurfaces (Physics). 615 0$aInterfaces (Physical sciences). 615 0$aThin films. 615 0$aMaterials?Surfaces. 615 0$aEngineering?Materials. 615 0$aLasers. 615 0$aPhotonics. 615 14$aMeasurement Science and Instrumentation. 615 24$aCharacterization and Evaluation of Materials. 615 24$aSurface and Interface Science, Thin Films. 615 24$aSurfaces and Interfaces, Thin Films. 615 24$aMaterials Engineering. 615 24$aOptics, Lasers, Photonics, Optical Devices. 676 $a681.25 676 $a681.25 700 $aQuinten$b Michael$4aut$4http://id.loc.gov/vocabulary/relators/aut$021849 801 0$bMiAaPQ 801 1$bMiAaPQ 801 2$bMiAaPQ 906 $aBOOK 912 $a9910373924903321 996 $aA Practical Guide to Surface Metrology$92509551 997 $aUNINA