LEADER 04366nam  22007935  450 
001 9910337875803321
005 20200703144339.0
010   $a3-030-23299-9
024 7 $a10.1007/978-3-030-23299-3
035   $a(CKB)4100000008780970
035   $a(MiAaPQ)EBC5841323
035   $a(DE-He213)978-3-030-23299-3
035   $a(PPN)238488837
035   $a(EXLCZ)994100000008780970
100   $a20190727d2019      u|         0
101 0 $aeng
135   $aurcnu||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$aFlash Lamp Annealing $eFrom Basics to Applications /$fby Lars Rebohle, Slawomir Prucnal, Denise Reichel
205   $a1st ed. 2019.
210  1$aCham :$cSpringer International Publishing :$cImprint: Springer,$d2019.
215   $a1 online resource (xviii, 288 pages)
225 1 $aSpringer Series in Materials Science,$x0933-033X ;$v288
311   $a3-030-23298-0 
320   $aIncludes bibliographical references and index.
327   $aIntroduction -- Technological background -- Basic components -- Flash lamps -- Process management and process control -- FLA assisted deposition -- Temperature -- Thermal budget -- Temperature measurements -- Temperature simulations -- FLA for semiconductors -- Defect engineering -- Doping -- Crystallization -- Semiconductor nanostructures -- Beyond semiconductors -- Transparent conducting oxides -- Metallic films -- High-k materials and dielectrics -- Flexible substrates -- Outlook.
330   $aThis book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.
410  0$aSpringer Series in Materials Science,$x0933-033X ;$v288
606   $aSemiconductors
606   $aOptical materials
606   $aElectronic materials
606   $aManufactures
606   $aLasers
606   $aPhotonics
606   $aMicrowaves
606   $aOptical engineering
606   $aNanotechnology
606   $aSemiconductors$3https://scigraph.springernature.com/ontologies/product-market-codes/P25150
606   $aOptical and Electronic Materials$3https://scigraph.springernature.com/ontologies/product-market-codes/Z12000
606   $aManufacturing, Machines, Tools, Processes$3https://scigraph.springernature.com/ontologies/product-market-codes/T22050
606   $aOptics, Lasers, Photonics, Optical Devices$3https://scigraph.springernature.com/ontologies/product-market-codes/P31030
606   $aMicrowaves, RF and Optical Engineering$3https://scigraph.springernature.com/ontologies/product-market-codes/T24019
606   $aNanotechnology and Microengineering$3https://scigraph.springernature.com/ontologies/product-market-codes/T18000
615  0$aSemiconductors.
615  0$aOptical materials.
615  0$aElectronic materials.
615  0$aManufactures.
615  0$aLasers.
615  0$aPhotonics.
615  0$aMicrowaves.
615  0$aOptical engineering.
615  0$aNanotechnology.
615 14$aSemiconductors.
615 24$aOptical and Electronic Materials.
615 24$aManufacturing, Machines, Tools, Processes.
615 24$aOptics, Lasers, Photonics, Optical Devices.
615 24$aMicrowaves, RF and Optical Engineering.
615 24$aNanotechnology and Microengineering.
676   $a621.38152
676   $a620.11
700   $aRebohle$b Lars$4aut$4http://id.loc.gov/vocabulary/relators/aut$0837191
702   $aPrucnal$b Slawomir$4aut$4http://id.loc.gov/vocabulary/relators/aut
702   $aReichel$b Denise$4aut$4http://id.loc.gov/vocabulary/relators/aut
906   $aBOOK
912   $a9910337875803321
996   $aFlash Lamp Annealing$92517318
997   $aUNINA