LEADER 00676nam0-2200229 --450 001 9910323859703321 005 20200401112013.0 010 $a978-1-259-58769-6 100 $a20190606d2018--------kmuy0itay5050----ba 101 0 $aeng 102 $aUS 200 1 $aSemiconductor manufacturing handbook /$fHwaiyu Geng 205 $a2nd ed. 210 1$aNew York, NY :$cMcGraw-Hill Education,$d2018 215 $aXXXI, 525 p.$cill.$d26 cm 700 1$aGeng,$bHwaiyu$0759339 801 0$aIT$bUNINA$gRICA$2UNIMARC 912 $a9910323859703321 952 $a13 SC I P 46$b2548 / 2019$fFINBC 959 $aFINBC 996 $aSemiconductor manufacturing handbook$91554224 997 $aUNINA