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100   $a20221014d2017      uy             0
101 0 $aeng
135   $aur|||||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 00$aEllipsometry $ePrinciples and Techniques for Materials Characterization /$fedited by Faustino Wahaia
210  1$aRijeka, Croatia :$cIntechOpen,$d2017.
215   $a1 online resource (160 pages) $cillustrations
311   $a953-51-3623-2 
320   $aIncludes bibliographical references.
517   $aEllipsometry 
606   $aEllipsometry
615  0$aEllipsometry.
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