LEADER 02256nam  2200433   450 
001 9910317762703321
005 20231214145420.0
010   $a1-83962-063-3
010   $a1-78985-296-X
035   $a(CKB)4970000000100456
035   $a(iGPub)INOP0000591
035   $a(oapen)https://directory.doabooks.org/handle/20.500.12854/54876
035   $a(EXLCZ)994970000000100456
100   $a20200217019    xx  c0            0
101 0 $aeng
135   $aurcn||||m|||a
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$aNovel metal electrodeposition and the recent application
210   $cIntechOpen$d2019
210  1$a[Place of publication not identified] :$cIntechOpen,$d2019.
210  4$dİ2019
215   $a1 online resource (172 pages)
311   $a1-78985-295-1 
330   $aGold and noble metals have been attractive to humans from ancient times because of their beautiful features. In modern society, noble metals, especially gold, play important roles as components in electronic devices because of their high electrical conductivity, chemical stability, and density. In the field of MEMS devices, the demand for continuous miniaturization and sensitivity enhancement is always high. Especially for MEMS accelerometers, sensitivity is affected by Brownian noise, and components with sufficient mass are needed to suppress this noise. Therefore, it is difficult to reduce the dimensions of components to allow further miniaturization of the device. This book presents recent progress in noble metal electrodeposition and applications of gold-based materials in the realization of highly sensitive CMOS-MEMS accelerometers.
606   $aTECHNOLOGY & ENGINEERING / Materials Science / Metals & Alloys$2bisacsh
610   $aPhysical Sciences
610   $aEngineering and Technology
610   $aMaterials Science
610   $aMetals and Nonmetals
615  7$aTECHNOLOGY & ENGINEERING / Materials Science / Metals & Alloys.
700   $aMasato Sone$4auth$01303470
702   $aSone$b Masato
702   $aMasu$b Kazuya
906   $aBOOK
912   $a9910317762703321
996   $aNovel metal electrodeposition and the recent application$93027085
997   $aUNINA