LEADER 02217nam  2200457   450 
001 9910317662203321
005 20231214145429.0
010   $a953-51-4793-5
010   $a953-51-3238-5
035   $a(CKB)4970000000099462
035   $a(iGPub)INOP0000791
035   $a(oapen)https://directory.doabooks.org/handle/20.500.12854/50661
035   $a(EXLCZ)994970000000099462
100   $a20200212017    xx  c0             0
101 0 $aeng
135   $aurcn#|||m|||a
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$aIon implantation  $eresearch and application
210   $cIntechOpen$d2017
210  1$a[Place of publication not identified] :$cIntechOpen,$d2017.
210  4$dİ2017
215   $a1 online resource (154 pages)
311   $a953-51-3237-7 
330   $aIon implantation is one of the promising areas of sciences and technologies. It has been observed as a continuously evolving technology. In this book, there is a detailed overview of the recent ion implantation research and innovation along with the existing ion implantation technological issues especially in microelectronics. The book also reviews the basic knowledge of the radiation-induced defects production during the ion implantation in case of a semiconductor structure for fabrication and development of the required perfect microelectronic devices. The improvement of the biocompatibility of biomaterials by ion implantation, which is a hot research topic, has been summarized in the book as well. Moreover, advanced materials characterization techniques are also covered in this book to evaluate the ion implantation impact on the materials.
517   $aIon implantation
606   $aSCIENCE / Mechanics / Thermodynamics$2bisacsh
610   $aPhysical Sciences
610   $aEngineering and Technology
610   $aMaterials Science
610   $aThermal Engineering
610   $aMetals and Nonmetals
615  7$aSCIENCE / Mechanics / Thermodynamics.
676   $a530
700   $aIshaq Ahmad$4auth$01316022
702   $aAhmad$b Ishaq
906   $aBOOK
912   $a9910317662203321
996   $aIon implantation$93032596
997   $aUNINA