LEADER 01058nas  2200373-a 450 
001 9910304630103321
005 20180406071904.5
011   $a1880-9413
035   $a(OCoLC)10468028
035   $a(CKB)958480266874
035   $a(CONSER)sn-84001202-
035   $a(DE-599)ZDB2397282-8
035   $a(EXLCZ)99958480266874
100   $a19840228b1958201u  --r            d
101 0 $ajpn
200 00$a?? [[????]]
210   $aT?ky?-to $cNihon Shink? Ky?kai
311   $a0559-8516 
517   $aSHINKU
517   $aSHINKU  J VAC SOC JPN
517   $aJOURNAL OF THE VACUUM SOCIETY OF JAPAN
517   $aSHINKUU
517 3 $aJournal of the Vacuum Society of Japan
531 0 $aShink?
606   $aVacuum technology$vPeriodicals
606   $aVacuum technology$2fast$3(OCoLC)fst01163626
608   $aPeriodicals.$2fast
615  0$aVacuum technology
615  7$aVacuum technology.
712 02$aNihon Shink? Ky?kai.
906   $aJOURNAL
912   $a9910304630103321
996   $a??$93002586
997   $aUNINA