LEADER 03438oam 2200517 450 001 9910299751703321 005 20190911103511.0 010 $a1-4471-5541-6 024 7 $a10.1007/978-1-4471-5541-6 035 $a(OCoLC)864747072 035 $a(MiFhGG)GVRL6YBB 035 $a(EXLCZ)992670000000428075 100 $a20130820d2014 uy 0 101 0 $aeng 135 $aurun|---uuuua 181 $ctxt 182 $cc 183 $acr 200 10$aFemtosecond laser 3D micromachining for microfluidic and optofluidic applications /$fKoji Sugioka, Ya Cheng 205 $a1st ed. 2014. 210 1$aLondon :$cSpringer,$d2014. 215 $a1 online resource (ix, 129 pages) $cillustrations (some color) 225 1 $aSpringerBriefs in Applied Sciences and Technology,$x2191-530X 300 $a"ISSN: 2191-530X." 311 $a1-4471-5540-8 320 $aIncludes bibliographical references. 327 $aFundamentals of femtosecond laser processing -- Fabrication of microfluidic structures in glass -- Fabrication of micromechanics -- Fabrication of microoptical components in glass -- Fabrication of microelectronics in glass -- Integration of microcomponents -- Applications of microfluidics and optifluidics fabricated by femtosecond laser -- Summary and outlook. 330 $aFemtosecond lasers opened up new avenue in materials processing due to its unique features of ultrashort pulse width and extremely high peak intensity. One of the most important features of femtosecond laser processing is that strong absorption can be induced even by materials which are transparent to the femtosecond laser beam due to nonlinear multiphoton absorption. The multiphoton absorption allows us to perform not only surface but also three-dimensionally internal microfabrication of transparent materials such as glass. This capability makes it possible to directly fabricate three-dimensional microfludics, micromechanics, microelectronics, and microoptics embedded in the glass. Further, these microcomponents can be easily integrated in a single glass microchip by the simple procedure using the femtosecond laser. Thus, the femtosecond laser processing provides some advantages over conventional methods such as traditional semiconductor processing or soft lithography for fabrication of microfludic, optofludic, and lab-on-a-chip devices, and thereby many researches on this topic are currently being carried out. This book presents a comprehensive review on the state of the art and future prospects of femtosecond laser processing for fabrication of microfludics and optofludics including principle of femtosecond laser processing, detailed fabrication procedures of each microcomponent, and practical applications to biochemical analysis. 410 0$aSpringerBriefs in applied sciences and technology. 606 $aFemtosecond lasers 606 $aLaser ablation 606 $aMicrofluidics 606 $aOptofluidics 615 0$aFemtosecond lasers. 615 0$aLaser ablation. 615 0$aMicrofluidics. 615 0$aOptofluidics. 676 $a621.366 700 $aSugioka$b Koji$4aut$4http://id.loc.gov/vocabulary/relators/aut$0886513 702 $aCheng$b Ya 801 0$bMiFhGG 801 1$bMiFhGG 906 $aBOOK 912 $a9910299751703321 996 $aFemtosecond Laser 3D Micromachining for Microfluidic and Optofluidic Applications$91979702 997 $aUNINA